Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films

Abstract

This work analyzes the effect of post-deposition rapid thermal annealing (RTA) on the crystal quality and the piezoelectric response of sputtered polycrystalline aluminium nitride (AlN) thin films. AlN films with mixed crystal texture were not significantly affected by RTA processing. However, in films exhibiting clear c-axis preferred orientation, the annealing produced a crystallization process, characterized by an increase in the grain size of the original crystallites, the growth of new small grains, and the reduction of defects. The improvement in the crystal quality was more evident in highly textured c-axis oriented films. However, the enhanced crystal quality of the films due to RTA was not accompanied by a significant improvement in the piezoelectric response. This is attributed to the presence of grains with opposite polarities that could not be rearranged through the RTA treatment. © 2006.