Superior local conductivity in self-organized nanodots on indium-tin-oxide films induced by femtosecond laser pulses

Abstract

Large-area surface ripple structures of indium-tin-oxide films, composed of self-organized nanodots, were induced by femtosecond laser pulses, without scanning. The multi-periodic spacing (∼800 nm, ∼400 nm and ∼200 nm) was observed in the laser-induced ripple of ITO films. The local conductivity of ITO films is significantly higher, by approximately 30 times, than that of the as-deposited ITO films, due to the formation of these nanodots. Such a significant change can be ascribed to the formation of indium metal-like clusters, which appear as budges of ∼ 5 nm height, due to an effective volume increase after breaking the In-O to form In-In bonding.