A virtual-interferometer technique for surface metrology

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Abstract

We have demonstrated a novel technique for performing surface metrology within wavefrontfeedback systems. By using wavefront sensing to measure surface gradients via displacements of an optic, we have reconstructed several surfaces with 40-nm RMS error. ©2009 Optical Society of America.

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Jobling, S. M., & Kwiat, P. G. (2009). A virtual-interferometer technique for surface metrology. In Optics InfoBase Conference Papers. Optical Society of America (OSA). https://doi.org/10.1364/fio.2009.fthn4

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