Graphene with a large area was synthesized on Cu foils by chemical vapor deposition under ambient pressure. A 4″ × 4″ graphene film was transferred onto a 6″ Si wafer with a thermally grown oxide film. Raman mapping indicates monolayer graphene dominates the transferred graphene film. Gas sensors were fabricated on a 4 mm × 3 mm size graphene film with a 1 nm palladium film deposited for hydrogen detection. Hydrogen in air with concentrations in 0.0025-1% (25-10,000 ppm) was used to test graphene-based gas sensors. The gas sensors based on palladium-decorated graphene films show high sensitivity, fast response and recovery, and can be used with multiple cycles. The mechanism of hydrogen detection is also discussed. © 2010 Published by Elsevier B.V.
CITATION STYLE
Wu, W., Liu, Z., Jauregui, L. A., Yu, Q., Pillai, R., Cao, H., … Pei, S. S. (2010). Wafer-scale synthesis of graphene by chemical vapor deposition and its application in hydrogen sensing. Sensors and Actuators, B: Chemical, 150(1), 296–300. https://doi.org/10.1016/j.snb.2010.06.070
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