Ellipsometry is a technique often used to measure the thickness and properties of a thin film. This article covers the instrumental, the theoretical, and practical aspects of this technique. Notably, different types of different ellipsometers including, nulling ellipsometer, rotating analyser ellipsometer, and photoelastic modulator ellipsometer are presented.
CITATION STYLE
Jellison, G. E. (2010). Ellipsometry. In Encyclopedia of Spectroscopy and Spectrometry, Second Edition (pp. 475–483). Elsevier. https://doi.org/10.1016/B978-0-12-374413-5.00133-0
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