CITATION STYLE
Wasa, K., & Matsushima, T. (2012). Ferroelectric Thin Films. In Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS: Second Edition (pp. 523–558). Elsevier Inc. https://doi.org/10.1016/B978-1-4377-3483-6.00007-3
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