We present our initial results toward understanding the interaction of temperature and stress on resonant frequencies of a matched-mode SOI-MEMS gyroscope. We also validate a new electrostatic frequency tuning design for gyroscopes that works over large displacements. A stress and temperature gradient is formed on the gyroscope die by using on-chip silicon heaters, affecting the gyroscope frequencies. Simulation and measurements of the gyroscope frequencies under different gradient conditions are compared. We also show that the orientation of the die with respect to an asymmetric package plays an important role in frequency response of the gyroscope to environmental conditions. © 2013 IEEE.
CITATION STYLE
Tatar, E., Guo, C., Mukherjee, T., & Fedder, G. K. (2013). Interaction effects of temperature and stress on matched-mode gyroscope frequencies. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2527–2530). https://doi.org/10.1109/Transducers.2013.6627320
Mendeley helps you to discover research relevant for your work.