Abstract
A novel Love-mode surface acoustic wave (SAW) sensor with ZnO guiding layer and 90° rotated ST-cut quartz crystal substrate will be presented. Analysis of this device with different thicknesses of ZnO films was undertaken. It will be shown that this novel structure offers distinct advantages over previously fabricated Love-mode structures. These advantages include significantly high sensitivity, small temperature coefficient of frequency and high electromechanical coupling coefficient. © 2002 Elsevier Science B.V. All rights reserved.
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Zadeh, K. K., Trinchi, A., Wlodarski, W., & Holland, A. (2002). A novel love-mode device based on a ZNo/ST-cut quartz crystal structure for sensing applications. Sensors and Actuators, A: Physical, 100(2–3), 135–143. https://doi.org/10.1016/S0924-4247(02)00038-9
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