Preparation of (001) oriented L1 0 phase FePt thin films by alternate sputtering

Abstract

(001) oriented FePt films were prepared by depositing a (Pt/Fe) n multilayer structure at high substrate temperature and using subsequent annealing. The orientation degree has a close connection with the initial layer materials, composition of the films, single layer thickness, total film thickness and substrate temperature. Post annealing at 600degC enhances the (00 l) peak intensities of the films and weakens the (111) peak intensities further. The formation of (001) orientation in Pt/Fe multilayer films can be interpreted qualitatively by the difference of the orientation of the initial Fe layer at different deposition condition and a grain growth model during annealing. [All rights reserved Elsevier]