Probe diagnostics of the RF barrier-torch discharge at atmospheric pressure

Abstract

Accurate control of plasma microparameters at the position of the substrate is crucial factor in applications of the barrier-torch plasma source for technological purposes. We present measurements of the electron temperature T e in the RF barrier-torch discharge by means of the planar RF-compensated Langmuir probe. The probe was mounted at the substrate position. The error caused by collisions of charged particles with neutrals in the space-charge sheath around the probe (collision probe working regime) at atmospheric pressure is discussed. In order to minimize this error the single probe technique was used to acquire the probe data, which were then recalculated to get the double probe characteristic. From this the electron temperature T e has been obtained in usual manner. The T e was measured at the position of the substrate in the single- and multi-torch barrier atmospheric plasma-jet systems. Using He as a working gas T e was found to be in the interval T e=2.7-6 eV depending on the applied RF power and system configuration. The neutral gas temperature has been measured by optical diagnostics and found to be 400-800 K. The plasma of the RF barrier-torch discharge is therefore strongly non-isothermal even at such high operation pressure. © 2003 Elsevier Science B.V. All rights reserved.