Abstract
This paper reports on the fabrication of ultra-thin (∼10 μm) polydimethylsiloxane (PDMS) films with embedded metal electrodes of 2 μm minimum feature size, as well as the release and transfer of large area films (>5 cm). The initial motivation for this work is the development of a miniature pump actuator for moving working fluid in an electrocaloric microcooler. PDMS diaphragms with electrodes are released and transferred onto contoured silicon chambers formed by gray-scale lithography and deep-reactive ion etching. © 2014 IEEE.
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Gao, J., Guo, D., Santhanam, S., Yu, Y., McGaughey, A. J. H., Yao, S. C., & Fedder, G. K. (2014). Release and transfer of large-area ultra-thin PDMS. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 544–547). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/MEMSYS.2014.6765698
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