CO2-based supercritical fluid deposition (SCFD) was utilized for the synthesis of ruthenium nanostructures on Si substrates and hafnium oxide (HfO2) films. Ru nanodots were formed by the reduction of a Ru precursor under a hydrogen environment. Ruthenium carbonyl was dissolved in supercritical CO2 in a pre-mix vessel, and this mixture was pumped into a reaction vessel which allowed it to undergo rapid expansion. The formation of Ru nanodots was studied as a function of key process parameters such as the weight of precursor used, the reaction temperature and the H 2 reactant pressure. Utilizing the Ru nanodots on a HfO2 control oxide, a flash memory device containing nanodots was fabricated and its memory characteristics were demonstrated. © 2013 Elsevier Ltd.
CITATION STYLE
Kim, D., Lee, H. B. R., Yoon, J., & Kim, H. (2013). Ru nanodot synthesis using CO2 supercritical fluid deposition. Journal of Physics and Chemistry of Solids, 74(5), 664–667. https://doi.org/10.1016/j.jpcs.2012.12.022
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