Synthesis of In 2 O 3 -Sc 2 O 3 transparent conducting oxide films

Abstract

The films of In 2 O 3 -Sc 2 O 3 were deposited using pulsed laser deposition technique on glass substrates at a temperature of 250 °C in an oxygen pressure of 10 m Torr. Films with Sc 2 O 3 composition between 0 and 10 wt.% were found to have resistivities varying between 1.85 × 10 -3 ohm cm and 2.18 × 10 -1 ωcm. The optical transparencies of the films were found to be more than 80% for wavelengths between 400 and 900 nm.