Tolerance analysis for design of multistage manufacturing processes using number-theoretical net method (NT-net)

Abstract

Recent developments in modeling stream of variation in multistage manufacturing system along with the urgent need for yield enhancement in the semiconductor industry has led to complex large scale simulation problems in design and performance prediction, thus challenging current-Monte Carlo-(MC) based simulation techniques. MC method prevails in statistical simulation approaches for multi-dimensional cases with general (i.e., non-Gaussian) distributions and/or complex response functions. A method is proposed based on number theory (NT-net) to reduce computing effort and the variability of MC's results in tolerance design and circuit performance simulation. The sampling strategy is improved by introducing NT-net that can provide better convergent rate over MC. The new method is presented and verified using several case studies, including analytical and industrial cases of a filter design and analyses of a four-bar mechanism. Results indicate a 90-95% reduction of computation effort with significant improvement in accuracy that can be achieved by the proposed technique.