Batch fabricated dual cantilever resistive probe for scanning thermal microscopy

Abstract

In this study dual cantilever resistive probes for scanning thermal microscopy (SThM) have been batch fabricated. In the dual probe, one is used as local heater and a second one nearby detects the thermal diffusivity at a microscopic scale. Various types of dual probes have been fabricated in one batch to allow experimental determination of the optimal sensor type for the measurement. Thermal scans with the dual cantilever probes have been performed in atmosphere, and contrast in thermal imaging indicating the difference of thermal conductivity is shown. Test of these probes under vacuum indicates strong thermal coupling through air between the two probes in the dual cantilever probes. © 2011 Elsevier B.V. All rights reserved.