Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

A Witvrouw; B Du Bois; P De Moor; A Verbist; C Van Hoof; H Bender; Kris Baert

Journal Article

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw A
Bois B
Moor P
et al.

Proc. SPIE Int. Soc. Opt. Eng (2000) 4174 130-141

N/ACitations

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Author supplied keywords

hf vapor
sacrificial etching
surface micro-machining

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CITATION STYLE

APA

Witvrouw, A., Bois, B. D., Moor, P. D., Verbist, A., Hoof, C. V., Bender, H., & Baert, K. (2000). Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal. Proc. SPIE Int. Soc. Opt. Eng, 4174, 130–141.

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Author supplied keywords

Cite

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