This communication reports a simple yet versatile nonlithographic approach for fabricating wafer-scale periodic nanohole arrays from a large variety of functional materials, including metals, semiconductors, and dielectrics. Spin-coated two-dimensional (2D) nonclose-packed colloidal crystals are used as first-generation shadow masks during physical vapor deposition to produce isolated nanohole arrays. These regular nanoholes can then be used as second-generation etching masks to create submicrometer void arrays in the substrates underneath. Complex patterns with micrometer-scale resolution can be made by standard microfabrication techniques for potential device applications. These 2D-ordered nanohole arrays may find important technological applications ranging from subwavelength optics to interferometric biosensors. Copyright © 2005 American Chemical Society.
CITATION STYLE
Jiang, P., & McFarland, M. J. (2005). Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals. Journal of the American Chemical Society, 127(11), 3710–3711. https://doi.org/10.1021/ja042789+
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