Wet etching of GaN, AlN, and SiC: A review

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Abstract

The wet etching of GaN, AlN, and SiC is reviewed including conventional etching in aqueous solutions, electrochemical etching in electrolytes and defect-selective chemical etching in molten salts. The mechanism of each etching process is discussed. Etching parameters leading to highly anisotropic etching, dopant-type/bandgap selective etching, defect-selective etching, as well as isotropic etching are discussed. The etch pit shapes and their origins are discussed. The applications of wet etching techniques to characterize crystal polarity and defect density/distribution are reviewed. Additional applications of wet etching for device fabrication, such as producing crystallographic etch profiles, are also reviewed. © 2004 Elsevier B.V. All rights reserved.

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Zhuang, D., & Edgar, J. H. (2005, January 17). Wet etching of GaN, AlN, and SiC: A review. Materials Science and Engineering R: Reports. Elsevier Ltd. https://doi.org/10.1016/j.mser.2004.11.002

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