Design and Fabrication of Cantilever MEMS Sensor Model for Electro-Chemical Gas Sensor

Abstract

The exponentially rise in technologies have broadened the horizon of human life to exploit enhanced systems and solutions to make precise, timely and optimal decision. Undeniably, majority of the scientific contributions intends to make human society and allied industrial activities productive and efficient. The up-surging industrial development and complex operating environments, especially chemical industries, strategic warehouses or infrastructures where there can be the presence of different gases in direct or indirect form, demands a robust and efficient sensing solution to avoid any unexpected hazardous. Considering the significance of a robust and efficient gas sensing technology, in this manuscript the predominant emphasis has been made on exploring different technologies and allied mechanisms to perform gas sensing. Being a survey paper, in this paper key gas sensing technologies, including cantilever based Micro-Electro-Mechanical System (MEMS) have been studied. Observing majority of the researches, it can be found that cantilever MEMS can be the potential solution for gas sensing and analytes identification in a complex operating environment. However, the design, shape and materials of the cantilever MEMS often decides efficacy to perform sensing. This survey revealed that to achieve optimal gas sensing solution, enhanced semiconductor cantilever design with optimized shape, and materials can yield sensitive and power efficient gas sensing solution. Considering the fact that the shape and materials have the combined impact on overall efficiency, certain machine learning approaches such as Artificial Neural Network or even enhanced algorithms can be considered. Obtaining an optimal solution with suitable materials, shape and size of cantilever which can be stated to be a NP-hard problem, machine learning or stochastic prediction models can also be considered. Structurally, the optimal setup with Piezo-resistive cantilever MEMS with optimal shape, size and coating material can enable optimal gas sensing performance of the micro-cantilever structure. Moreover, the selection of coating materials can help achieving deflection sensing or surface strain to perform flow rate assessment. Keywords— Micro-Electro-Mechanical Sensor, CantileverMEMS, Machine Learning, Gas sensor, Flow Rate Analyzer