Modelling of relief of phase reflection diffraction grating

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Abstract

This article describes theoretical and experimental results on phase reflection diffraction gratings. Based on Fourier optics the mathematical formulation describing diffraction dispersion of light from a relief grating of the trapezium profile is derived. We propose a method that lets us estimate the grating's geometric parameters in a versatile modelling system. We have designed an original programme that estimates diffraction intensities and calculates diffraction efficiency. The estimated intensities are used to reconstruct the grating's geometrical properties using our mathematical model. The precision of the method is evaluated as the deviation of obtained results from microscopy data. © 2003 Elsevier Inc. All rights reserved.

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Margelevičius, M., Grigaliunas, V., Pranevičius, H., & Margelevičius, J. (2003). Modelling of relief of phase reflection diffraction grating. Applied Mathematical Modelling, 27(12), 1035–1049. https://doi.org/10.1016/S0307-904X(03)00137-9

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