Analysis of U shaped MEMS Micro cantilever using COMSOL

  • Aparna K
  • et al.
N/ACitations
Citations of this article
1Readers
Mendeley users who have this article in their library.
Get full text

Abstract

This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.

Cite

CITATION STYLE

APA

Aparna, K. D., & Amarnath, N. (2020). Analysis of U shaped MEMS Micro cantilever using COMSOL. International Journal of Recent Technology and Engineering (IJRTE), 8(6), 2860–2861. https://doi.org/10.35940/ijrte.f7453.038620

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free