Flexible membrane pressure sensor

Abstract

A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution. © 2004 Published by Elsevier B.V.