Ultra-precision machining is rarely used in the production industry due to high costs as a consequence of disproportionally long primary and secondary processing times. In this context, the implementation of innovative machine technologies presents a suitable approach to increase productivity and reduce manufacturing costs. This paper introduces the implementation of an electromagnetic linear guide within a two-axis positioning stage for ultra-precision and micro machining. Using analytical models and FEM simulations, an optimised design for the guide's structure and magnet configuration is developed with regard to the intended application in ultra-precision high performance cutting. The new guide system provides frictionless operation for rapid and precise feed movements. Stiffness and damping of the electromagnetic guide can be adjusted to current process requirements. Fine positioning of the levitating carriage within the air gap enables an increase of the overall position accuracy.
Denkena, B., Dahlmann, D., & Krueger, R. (2016). Design and Optimisation of an Electromagnetic Linear Guide for Ultra-Precision High Performance Cutting. In Procedia CIRP (Vol. 46, pp. 147–150). Elsevier B.V. https://doi.org/10.1016/j.procir.2016.02.056