Sputtering and ripples formation by gas cluster ions on LiNbO-=SUB=-3-=/SUB=- crystal

Abstract

The work addresses the creation of surface structures on lithium niobate single crystals. Surface topography of lithium niobate surface sputtered with gas cluster ion beams was investigated. Surface ripples induced on the surface were analyzed using power spectral density functions approach, their evolution with ion fluence and their dependence on the cluster ion energy discussed. Sputter yield value was shown to decrease with surface roughness increase, the reasons of the effect are indicated. Local piezoresponse of the rippled surface was studied. Keywords: ferroelectrics, LiNbO 3 crystal, gas cluster ions, self-organization, AFM, PSD function.