Recent advances in focused ion beam technology and applications

Abstract

Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano- to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fields of materials research. © 2014 Materials Research Society.