Beam properties of fully optimized, table-top, coherent source at 30 nm

Abstract

We present results on development and experimental implementation of a 1-kHz, coherent extreme ultraviolet (XUV) radiation source based on high-order harmonic generation of the femtosecond, near-infrared laser pulses produced by the titanium-doped sapphire laser system (35 fs, 1.2 mJ, 810 nm) at the Institute of Physics AS CR / PALS Centre. The source comprises a low-density static gas cell filled with a conversion medium, typically argon. The comprehensive optimization of the XUV harmonic source has been performed with respect to major parameters such as gas pressure in the cell, cell length, position of the focus of the driving laser field with respect to the gas cell position, size of the driving near-infrared laser beam, chirp of the femtosecond pulse, and the focal length of the lens deployed in the experimental setup. Harmonic spectra were recorded using an XUV transmission grating spectrometer developed specifically for this purpose. Detailed characterization of the XUV source has been performed including measurement of the XUV beam profile, M2 parameter of the beam, absolute energy, and spatial coherence. © 2011 Versita Warsaw and Springer-Verlag Wien.