Comparing silicon and diamond micro-cantilevers based sensors for detection of added mass and stiffness changes

6Citations
Citations of this article
17Readers
Mendeley users who have this article in their library.

Abstract

In this work, silicon and diamond cantilevers based sensors have been designed and fabricated on five different geometries. Parylene homogeneous nanolayers have been deposited over the sensors in order to evaluate the performance of each design. Silicon and diamond have been compared as building materials for resonant sensors and the corresponding shifts on resonance frequency and quality factor have been recorded. A model is further introduced to disentangle the effect of added mass and rigidity changes. We demonstrate the sensitivity of our sensor to mass effect for low mass deposition and the diamond cantilevers exhibit a three times higher sensitivity as compared to silicon cantilevers for the same geometry.

Cite

CITATION STYLE

APA

Possas, M., Rousseau, L., Ghassemi, F., Lissorgues, G., Gonzales, P., Scorsone, E., & Bergonzo, P. (2015). Comparing silicon and diamond micro-cantilevers based sensors for detection of added mass and stiffness changes. In Procedia Engineering (Vol. 120, pp. 1115–1119). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2015.08.807

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free