Does integrated-circuit fabrication show the path for the future of mechanical manufacturing?

Abstract

Micromechanical devices systems (MEMS) include sensory devices, actuators, and motors. Devices are fabricated using sequence of conventional VLSI unit processing steps like photolithography, etching, and oxidation in addition to few additional processes. These include reactive ion etching and wafer bonding. Major benefits include ease of planning even for highly complex systems. Structures can also be implemented with local intelligence like sensors and processors to monitor material state variables.