Optical dielectric behaviors of copper zinc alloy thin films

Abstract

Variable angle spectroscopic ellipsometry (VASE) was employed to investigate the dielectric behaviors of Cu-Zn alloy films on silicon substrate prepared using direct current (DC) magnetron sputtering. The influence of the thickness and alloy composition on the dielectric properties of Cu-Zn alloys was studied. A dielectric function model combining with a surface effective medium theory (EMA) layer and a thin Lorentz-Drude layer was established to all alloy films to determine the dielectric functions. It shows that the dispersion behaviors of the alloy films are sensitive to the film thickness and the composition of the alloys. © 2012 American Institute of Physics.