Partial Wetting of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish

Abstract

In semiconductor manufacturing, potential wetting issues with aqueous chemistries are becoming a concern as feature dimensions are continuously scaled down and novel materials with different wetting properties are introduced in new technology nodes. The wetting behavior of silicon nanopillars with different dimensions and surface modifications has been studied using static contact angle, decoration by etching, and attenuated total reflection infra-red spectroscopy (ATR-FTIR). The contact angle measurements showed a consistent deviation from the classic wetting models for patterned substrates with an hydrophilic surface termination. Under these conditions the decoration and ATR-FTIR studies gave evidence for partial wetting, with residual gas lasting for more than 30 min. It is proposed that this was resulting from the formation of long-lasting surface nanobubbles localized in-between or at the bottom of nanopillars. On the other hand the residual gas volume estimated by ATR-FTIR seemed too small to explain the contact angle deviations. It is proposed that the apparent extension of the superhydrophobic regime to lower contact angles resulted from modifications of the wettability of the surface of nanopillars caused by the manufacturing process. Both the formation of nanobubbles and the extension of the superhydrophobic regime may present challenges for aqueous cleaning in semiconductor manufacturing. © 2014 The Electrochemical Society. All rights reserved.