High frequency znO-on-diamond monolithic filters

Abstract

This paper reports on the design and implementation of acoustically-coupled thin-film ZnO-on-diamond resonators fabricated on a single resonant structure (monolithic filter). These small devices benefit from the large elastic modulus of diamond (largest in nature) to reach higher center frequencies while the frequency-determining dimension of the device stays in a range comfortably feasible to fabricate using conventional photolithography and etching tools. Lateral mode filters with center frequencies up to 900MHz are demonstrated with 1.4x frequency increase compared to the devices made on silicon.