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Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform

2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings (2021)
DOI: 10.1364/cleo_si.2021.stu2q.1
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Abstract

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2p phase shifter with a 1.54 µs time constant and 0.5 dB insertion loss in IMEC's iSiPP50G platform.

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APA

Edinger, P., Kristinsson, K., Errando-Herranz, C., Yuji Takabayashi, A., Sattari, H., Quack, N., … Gylfason, K. B. (2021). Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform. In 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1364/cleo_si.2021.stu2q.1

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