Pengaruh Waktu Post-Treatment Terhadap Sifat Permukaan Lapisan Nitridasi

Abstract

Post-treatment process on nitridation layer is anadvance treatment process after deposition of nitridation layer on substrate. The characteristic of nitridation layer is effected by post-treatment process. Deposition of nitridation is used by nitrogen gas, with pressure 1.6 mbar, and temperature 300 °C. Furthermore, post-treatment process parameter is used by argon gas, with pressure 1 mbar, and temperature 300 °C. Variation times of post-treatment are used by 10, 20, and 30 minutes. The characterization of nitridation layer is known of effect post-treatment time on hardness of nitridation layer. Vickers microhardness tester is used to determine hardness of nitridation layers.