Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

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Abstract

The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.

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Salvat-Pujol, F., Valentí, R., & Werner, W. S. (2015). Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments. Beilstein Journal of Nanotechnology, 6(1), 1260–1267. https://doi.org/10.3762/bjnano.6.129

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