Fabrication of topologically-complex 3D microstructures by femtosecond laser machining and polymer molding

Abstract

We demonstrate the demolding of topologically complex three-dimensional elastomeric microstructures from a femtosecond laser micromachined glass substrate. Demolding success rates of >90% are achieved, which are qualitatively supported by a simple mechanical model. © Owned by the authors, published by EDP Sciences, 2013.