Pulsed and RF glow discharge in Helium atmosphere

Abstract

This paper reports the optical and electrical characterization of sinusoidal and pulse glow-discharge plasma in helium. A homogeneous type of discharge has been observed for different operating conditions in helium DBD. The image of discharges makes sure that the diffuse discharge covers the entire surface of the electrodes. Optical emission spectroscopy has been used to determine the main emission lines of the helium glow discharge plasma. The internal plasma parameters of DBDs have been investigated at different operating conditions. It has been observed that the DBDs are becoming more intense with increase in pressure and applied power. The effect of the excitation mechanism on the emission properties and discharge parameters for the helium DBD is studied experimentally and further analysed by using plasma simulation tool OOPIC-Pro.