Abstract
Standard Reference Material 484 is an artifact for calibrating the magnifica-tion scale of a Scanning Electron Mi-croscope (SEM) within the range of 1000 X to 20000 X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instru-mentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f.
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CITATION STYLE
Fu, J., Croarkin, M. C., & Vorburger, T. V. (1994). The measurement and uncertainty of a calibration standard for the scanning electron microscope. Journal of Research of the National Institute of Standards and Technology, 99(2), 191. https://doi.org/10.6028/jres.099.015
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