This paper presents the design, fabrication and testing of a piezo-electrically driven actuator system for out-of-plane actuation of a micro-lens. The system consists of a micro-lens holding platform symmetrically supported by eight piezo-electrically driven actuators. The piezo-electrical actuator is a 900μm long multilayer structure consisting of Si (4μm)/SiO 2(1μm)/Ti(0.015μm)/Pt(0.135μm)/PZT(1.5μm) and inter-digitated Ti(0.015μm)/Pt(0.135μm) top electrodes. It is connected to the micro-lens holding platform through a 600μm long 4μm thick silicon structure. The actuation system has been successfully fabricated using bulk micro-machining with a 600μm glass microsphere lens mounted, and tested. The device demonstrated about 37μm out-of-plane deflection using 60VDC. © 2011 Published by Elsevier Ltd.
Michael, A., & Kwok, C. Y. (2011). Piezoelectrically driven micro-lens out-of-plane actuation. In Procedia Engineering (Vol. 25, pp. 697–700). https://doi.org/10.1016/j.proeng.2011.12.172