Piezoelectrically driven micro-lens out-of-plane actuation

Citations of this article
Mendeley users who have this article in their library.


This paper presents the design, fabrication and testing of a piezo-electrically driven actuator system for out-of-plane actuation of a micro-lens. The system consists of a micro-lens holding platform symmetrically supported by eight piezo-electrically driven actuators. The piezo-electrical actuator is a 900μm long multilayer structure consisting of Si (4μm)/SiO 2(1μm)/Ti(0.015μm)/Pt(0.135μm)/PZT(1.5μm) and inter-digitated Ti(0.015μm)/Pt(0.135μm) top electrodes. It is connected to the micro-lens holding platform through a 600μm long 4μm thick silicon structure. The actuation system has been successfully fabricated using bulk micro-machining with a 600μm glass microsphere lens mounted, and tested. The device demonstrated about 37μm out-of-plane deflection using 60VDC. © 2011 Published by Elsevier Ltd.




Michael, A., & Kwok, C. Y. (2011). Piezoelectrically driven micro-lens out-of-plane actuation. In Procedia Engineering (Vol. 25, pp. 697–700). https://doi.org/10.1016/j.proeng.2011.12.172

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free