Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

Abstract

A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion. © 2010 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.