Polysilicon is the elementary raw material for integrated circuits and photovoltaic products. In recent years, the technology of polysilicon made great progress, its cost dramatically reduced, and it provided ideal conditions for photovoltaic energy power to meet the state-set price. This chapter summarizes the achievements of Siemens process, including the technology process, the technical principle, main equipment, technological operations, polysilicon quality control, energy-saving feature, and cost reduction. This could be used as a reference for the production of polysilicon.
Yan, D. (2019). Siemens process. In Handbook of Photovoltaic Silicon (pp. 37–68). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-56472-1_4