Diffractive shaping of excimer-laser beams for pulsed laser deposition

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Abstract

We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

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Kekkonen, V., Hakola, A., & Kajava, T. (2011). Diffractive shaping of excimer-laser beams for pulsed laser deposition. Journal of the European Optical Society, 6, 48. https://doi.org/10.2971/jeos.2011.11013s

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