Materials and microfabrication processes for microfluidic devices

Abstract

This chapter elaborates on the varied materials and microfabrication techniques used in the manufacture of microfluidic devices. The origins of these techniques traces back to semiconductor and precision machining industries. This chapter details microfabrication processes such as bulk and surface micromachining for silicon, glass and polymeric materials. It also discusses precision machining techniques such as micro injection molding, hot embossing, micro stereolithography. Over the past few decades, these techniques have been modified to suit the complexity and precision required in the 3-D construction of microfluidic devices. New materials such as parylene, poly-dimethylsiloxane, paraffin and hydrogels have been in troduced and microfabrication techniques developed that enhances the functionality of microfluidic devices. This chapter provides a comprehensive overview of material properties, microfabrication procedures and examples of its application in microfluidic devices. © 2008 Springer Science+Business Media, LLC.