3D computer-aided nanoprinting for solid-state nanopores

Abstract

Here we report on the generation of solid-state nanopores with controllable sizes and shapes based on direct laser writing with a computer-aided two-photon polymerization process. Through a theoretical and experimental study of the accumulation effect during the two-photon polymerization, we have achieved nanopores with an inner diameter of down to ∼λ/10 (76.9 nm) for the first time, which is far beyond Abbe's diffraction limit. The generated nanopores can be stacked to form a channel with desired asymmetric shapes. This work provides the potential to integrate the solid-state nanopores into functional devices and opens up a new avenue for optimizing the gating properties of artificial membranes.