Synthesis of nanoporous tio2 with the use of diluted hydrogen peroxide solution and its application in gas sensing

Abstract

The chemical routes of metal oxidation in presence of hydrogen peroxide solutions are tailor-made for the synthesis of biocompatible metal oxide surfaces with clean intermediate and end products, such as oxides, hydroxides, hydrogen and water. The hydrolysis of titanium in hydrogen peroxide solutions is particularly interesting for medical applications, forming micro-and nanoscale titania surfaces. In this paper, the content of the hydrolysis solution is revised, allowing the fabrication of gas sensor devices based on nanoporous titania. Nanopore and microcrack formations were discussed in detail by monitoring the structural changes on the thin film surface with field-emission scanning electron microscopy (FE-SEM). A stable rutile crystalline phase was detected by glancing incidence X-ray diffraction (GI-XRD) measurement after repetitive hydrothermal processes. Electrical conductance measurements were carried out at high temperatures (400–600◦ C) under humid airflow (40% RH@20◦ C) with the injection of various concentrations of a wide set of test compounds (C2 H3 N, CO, H2, NO2, C2 H6 O), to observe the sensing capabilities of the material. Furthermore, the humidity effects on the sensing properties toward H2, CO, and C2 H6 O have been discussed.