Limits to mode-localized sensing using micro- and nanomechanical resonator arrays

Abstract

In recent years, the concept of utilizing the phenomenon of vibration mode-localization as a paradigm of mechanical sensing has made profound impact in the design and development of highly sensitive micro- and nanomechanical sensors. Unprecedented enhancements in sensor response exceeding three orders of magnitude relative to the more conventional resonant frequency shift based technique have been both theoretically and experimentally demonstrated using this new sensing approach. However, the ultimate limits of detection and in consequence, the minimum attainable resolution in such mode-localized sensors still remain uncertain. This paper aims to fill this gap by investigating the limits to sensitivity enhancement imposed on such sensors, by some of the fundamental physical noise processes, the bandwidth of operation and the noise from the electronic interfacial circuits. Our analyses indicate that such mode-localized sensors offer tremendous potential for highly sensitive mass and stiffness detection with ultimate resolutions that may be orders of magnitude better than most conventional micro- and nanomechanical resonant sensors. © 2011 American Institute of Physics.