The thermalization of energetic atoms during the sputtering process

Abstract

We consider the sputter deposition process and present a calculation of the rate of energy loss of sputtered atoms and reflected neutrals due to elastic collisions with the sputtering gas atoms. Compared to previous calculations we have explicitly taken into account the strong energy dependence of the scattering cross section recently reported by Robinson. The results suggest a much less efficient energy loss rate than previously envisaged using the classical thermal cross sections. Such thermal cross sections have been used in previous calculations to explain the high sputtering pressure required for preparing high critical transition temperature superconductors Nb3Ge and Nb3Sn.