Fast STEM Spectrum Imaging Using Simultaneous EELS and EDS

Abstract

Up to now, researchers performing analytical investigations in the transmission electron microscope typically had to choose between analytical spectroscopy techniques. They might choose energy dispersive X-ray spectroscopy (EDS) analysis when working with thick samples containing high-Z elements or choose electron energy-loss spectroscopy (EELS) when studying low-Z materials in thin samples. With the advent of STEM instruments possessing both high-mechanical stability and high-brightness probes, coupled with the latest generation of fast, efficient X-ray and EELS detectors, choosing between complementary techniques is a significant restriction. The acquisition systems available up to now have forced a choice because EELS, EDS, and fast scanning have not been designed to work together, resulting in inefficient data collection.