FEM analysis for the influence of manufacturing process defects on dynamic behavior of thin chromium microbeam

Abstract

This paper identifies and investigates the influence of technological defects of manufacturing process on the dynamic behavior of thin chromium microbeam. The analytical models will be analyzed and corrected using finite element method (FEM) to determine their validity under influence of technological defects. A semi-analytical model will be proposed for the extraction of corrective factors from 3D FEM simulation of dynamic behavior of microbeam. Final results indicate that the correction of technological defects is very significant for Cr microbeam 80×2×0.95μm3. In other hand, the corrected value of Young's modulus is very close to the experimental results and it is about 279.1GPa. © (2014) Trans Tech Publications, Switzerland.