Preparation of piezoelectric PZT micro-discs by sol-gel method

Abstract

This paper describes a modified sol-gel method to prepare PZT discs of nearly 1 µm thickness without repeating any process. The method is based on the subdivision of the PZT precursor into small areas prior to sintering. The subdivision is realised by pouring the precursor solution into a ZnO mold. Ultrasonic transducers were fabricated using the PZT disc and the piezoelectricity of the PZT disc in GHz ranges were discussed.