Large scale programmable photonic circuits using silicon photonic MEMS

Umar Khan; Iman Zand; Pierre Edinger; Gaehun Jo; Simon J. Bleiker; Alain Yuji Takabayashi; Cleitus Antony; Junsu Lee; Arun Kumar Malik; Peter Verheyen; Cristina Lerma Arce; Tigers Jonuzi; Jan Watte; Niels Quack; Frank Niklaus; Kristinn B. Gylfason; Wim Bogaerts

Conference ProceedingsOPEN ACCESS

Large scale programmable photonic circuits using silicon photonic MEMS

2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings (2022)

DOI: 10.1364/cleo_at.2022.am2c.5

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Abstract

We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.

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APA

Khan, U., Zand, I., Edinger, P., Jo, G., Bleiker, S. J., Takabayashi, A. Y., … Bogaerts, W. (2022). Large scale programmable photonic circuits using silicon photonic MEMS. In 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1364/cleo_at.2022.am2c.5

Large scale programmable photonic circuits using silicon photonic MEMS

Abstract

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